Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Broadband multilayer-coated normal incidence blazed grating with similar to 10% diffraction efficiency through the 13-16 nm wavelength region | |
其他题名 | 论文其他题名 |
Zhang L. C.; Lin H.; Jin C. S.; Zhou H. J.; Hu T. L. | |
2009 | |
发表期刊 | Optics Letters
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ISSN | 0146-9592 |
卷号 | 34期号:6页码:818-820 |
摘要 | Diffraction gratings used in extreme UV are typically coated with periodic multilayer thin films. These coatings have a small bandwidth, thus leading to a narrow usable spectral region of multilayer gratings. Well-designed aperiodic multilayer coatings could provide high reflectivity over a much broader wavelength region, so they could broaden the usable spectral region of multilayer gratings. We designed and deposited an aperiodic Mo/Si multilayer coating onto a blazed grating substrate. At an incidence angle of 10 degrees, the -2nd-order diffraction efficiency of the multilayer grating is similar to 10% through the wavelength range of 13-16 nm. (C) 2009 Optical Society of America. |
收录类别 | SCI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/24808 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Zhang L. C.,Lin H.,Jin C. S.,et al. Broadband multilayer-coated normal incidence blazed grating with similar to 10% diffraction efficiency through the 13-16 nm wavelength region[J]. Optics Letters,2009,34(6):818-820. |
APA | Zhang L. C.,Lin H.,Jin C. S.,Zhou H. J.,&Hu T. L..(2009).Broadband multilayer-coated normal incidence blazed grating with similar to 10% diffraction efficiency through the 13-16 nm wavelength region.Optics Letters,34(6),818-820. |
MLA | Zhang L. C.,et al."Broadband multilayer-coated normal incidence blazed grating with similar to 10% diffraction efficiency through the 13-16 nm wavelength region".Optics Letters 34.6(2009):818-820. |
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