Fabrication of a Polymeric Optical Waveguide-On-Flex Using Electrostatic-Induced Lithography

	Fabrication of a Polymeric Optical Waveguide-On-Flex Using Electrostatic-Induced Lithography
其他题名	论文其他题名
	Hin T. Y.; Liu C. Q.; Conway P. P.; Yu W. X.; Cargill S.; Desmulliez M. P. Y.
	2010
发表期刊	Ieee Photonics Technology Letters
ISSN	1041-1135
卷号	22 期号:13 页码:957-959
摘要	A method has been developed for the manufacture of polymeric multimode waveguides using an electrostatic field-induced self assembly and pattern formation process. A spin-coated liquid optical polymer placed between two conductive plates experiences an electrostatic force from an applied electric field gradient across the plates. Surface electrohydrodynamics instability patterning is employed to fabricate optical core microstructures using a patterned master plate. The result shows a good replication of the pattern from the master plate to the optical polymer. The process protocols were defined to achieve waveguides with low sidewall roughness together with an optical coupling interface. We have demonstrated multimode waveguide arrays with a 50 mu m 50 mu m cross section and 250-mu m pitch on a 10 mm 10 mm flexible substrate. The refractive index and absorption measurement of the electrostatic-induced optical film show insignificant changes when compared with the unexposed film. Using the cutback approach, the propagation loss of the waveguide is measured at -1.97 dB/cm. The whole fabrication process is found to be fast, cost-effective, and no photosensitive material is needed as in the conventional photolithography approach.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/24783
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Hin T. Y.,Liu C. Q.,Conway P. P.,et al. Fabrication of a Polymeric Optical Waveguide-On-Flex Using Electrostatic-Induced Lithography[J]. Ieee Photonics Technology Letters,2010,22(13):957-959.
APA	Hin T. Y.,Liu C. Q.,Conway P. P.,Yu W. X.,Cargill S.,&Desmulliez M. P. Y..(2010).Fabrication of a Polymeric Optical Waveguide-On-Flex Using Electrostatic-Induced Lithography.Ieee Photonics Technology Letters,22(13),957-959.
MLA	Hin T. Y.,et al."Fabrication of a Polymeric Optical Waveguide-On-Flex Using Electrostatic-Induced Lithography".Ieee Photonics Technology Letters 22.13(2010):957-959.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Hin-2010-Fabrication（835KB）			开放获取	--	浏览下载