Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Structure, luminescence and electrical properties of ZnO thin films annealed in H-2 and H2O ambient: A comparative study | |
其他题名 | 论文其他题名 |
Liu W. W.; Yao B.; Li Y. F.; Li B. H.; Zhang Z. Z.; Shan C. X.; Zhao D. X.; Zhang J. Y.; Shen D. Z.; Fan X. W. | |
2010 | |
发表期刊 | Thin Solid Films |
ISSN | 0040-6090 |
卷号 | 518期号:14页码:3923-3928 |
摘要 | Undoped ZnO films were grown on a c-plane sapphire by plasma-assisted molecular-beam epitaxy technique, and subsequently annealed at 200-500 degrees C with steps of 100 degrees C in water vapour and hydrogen ambient, respectively. It is found that the c-axis lattice constant of the ZnO films annealed in hydrogen or water vapour at 200 degrees C increases sharply, thereafter decreases slowly with increasing annealing temperature ranging from 300 degrees C to 500 degrees C. The stress in the as-grown ZnO films was more easily relaxed in water vapour than in hydrogen ambient. Interestingly, the controversial luminescence band at 3310 eV, which is often observed in photoluminescence (PL) spectra of the ZnO films doped by p-type dopants, was observed in the PL spectra of the annealed undoped ZnO films and the PL intensity increases with increasing annealing temperature, indicating that the 3.310 eV band is not related to p-type doping of ZnO films. The electron concentration of the ZnO films increases sharply with increasing annealing temperature when annealed in hydrogen ambient but decreases slowly when annealed in water vapour. The mechanisms of the effects of annealing ambient on the properties of the ZnO films are discussed. Crown Copyright (C) 2009 Published by Elsevier B.V. All rights reserved. |
收录类别 | SCI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/24755 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Liu W. W.,Yao B.,Li Y. F.,et al. Structure, luminescence and electrical properties of ZnO thin films annealed in H-2 and H2O ambient: A comparative study[J]. Thin Solid Films,2010,518(14):3923-3928. |
APA | Liu W. W..,Yao B..,Li Y. F..,Li B. H..,Zhang Z. Z..,...&Fan X. W..(2010).Structure, luminescence and electrical properties of ZnO thin films annealed in H-2 and H2O ambient: A comparative study.Thin Solid Films,518(14),3923-3928. |
MLA | Liu W. W.,et al."Structure, luminescence and electrical properties of ZnO thin films annealed in H-2 and H2O ambient: A comparative study".Thin Solid Films 518.14(2010):3923-3928. |
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