Lithographic fabrication of diffractive optical elements in hybrid sol-gel glass on 3-D curved surfaces

	Lithographic fabrication of diffractive optical elements in hybrid sol-gel glass on 3-D curved surfaces
其他题名	论文其他题名
	Wang T. S.; Yu W. X.; Zhang D. Y.; Li C. R.; Zhang H. X.; Xu W. B.; Xu Z. J.; Liu H.; Sun Q. A.; Lu Z. W.
	2010
发表期刊	Optics Express
ISSN	1094-4087
卷号	18 期号:24 页码:25102-25107
摘要	We demonstrate the lithographic fabrication of diffractive optical elements (DOEs) in hybrid SiO2/TiO2 sol-gel glass on 3-D curved surfaces. The concentric circular gratings with periods of 20 mu m, 10 mu m and 5 mu m have been fabricated in sol-gel glass on concave lens by laser direct writing successfully. Continuous 3-Dimensional surface relief with a height of 435nm, 110nm and 50nm has been obtained for the period of 20 mu m, 10 mu m and 5 mu m respectively. The optical test results of the fabricated DOE shows only a little bit deviation from the theoretical calculated results which can be explained by 3-D curved surface effect. We believe this technology can be an effective method to fabricate DOEs with even more complex surface profile on 3-D curved surfaces in terms of its simplicity and cost-effectiveness. (C) 2010 Optical Society of America
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/24750
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Wang T. S.,Yu W. X.,Zhang D. Y.,et al. Lithographic fabrication of diffractive optical elements in hybrid sol-gel glass on 3-D curved surfaces[J]. Optics Express,2010,18(24):25102-25107.
APA	Wang T. S..,Yu W. X..,Zhang D. Y..,Li C. R..,Zhang H. X..,...&Lu Z. W..(2010).Lithographic fabrication of diffractive optical elements in hybrid sol-gel glass on 3-D curved surfaces.Optics Express,18(24),25102-25107.
MLA	Wang T. S.,et al."Lithographic fabrication of diffractive optical elements in hybrid sol-gel glass on 3-D curved surfaces".Optics Express 18.24(2010):25102-25107.

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