New design of beam expanding unit for excimer laser

	New design of beam expanding unit for excimer laser
其他题名	论文其他题名
	Zhao Y.; Gong Y.
	2012
发表期刊	Optics and Lasers in Engineering
ISSN	0143-8166
卷号	50 期号:9 页码:1202-1208
摘要	The excimer laser beam is used widespread in the areas of photolithography, ophthalmic operations, cold working and others, because of its high power, high homogeneity and high stability. However, based on the rectangular cross-section distribution characteristic of the laser, it must be expanded in one dimension first to achieve square cross-section distribution for further use. The reported beam expanding units has the deficiencies of serious speckle effect of coherence and the strict tolerance of alignment, respectively. A kind of multi-components parallel reflective expander was proposed based on the shortages above. The structures of such beam expanding units were determined by calculating linear system of equations, and two kind of them were selected by analyzing the feasibilities of different structures due to the solves of equations. A synthesis comparison was executed at the aspects of tolerance analyzing, transmission efficiencies and uniformities of output beam. According to the results of simulations, the designed four components beam expanding unit is proven to be an optimal scheme because of the evident declines of the tolerance sensitivities and speckle effects. Meanwhile, the homogeneity of output beam is improved. (C) 2012 Elsevier Ltd. All rights reserved.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/24626
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhao Y.,Gong Y.. New design of beam expanding unit for excimer laser[J]. Optics and Lasers in Engineering,2012,50(9):1202-1208.
APA	Zhao Y.,&Gong Y..(2012).New design of beam expanding unit for excimer laser.Optics and Lasers in Engineering,50(9),1202-1208.
MLA	Zhao Y.,et al."New design of beam expanding unit for excimer laser".Optics and Lasers in Engineering 50.9(2012):1202-1208.

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