Testing aspheric in interferometric setups: Removal of adjustment errors from measurement result

	Testing aspheric in interferometric setups: Removal of adjustment errors from measurement result
其他题名	论文其他题名
	Liu H.; Lu Z.; Li F.; Xie Y.; Sun Q.
	2004
发表期刊	Optics Communications
ISSN	304018
卷号	242 期号:4—6 页码:339-344
摘要	We demonstrate experimentally a valid method to remove the adjustment errors from wavefront aberration in interferometric setups when measuring convex aspheric surface with asymmetric errors. By comparing the coefficients of Zernike polynomials of the first measurement with that of the second measurement after rotating the aspheric to 180, we can decide whether there are adjustment errors in measured wavefront and remove them. We have successfully tested a 100-mm diameter convex surface of errors 234 nm P-V after removing adjustment errors. It is believed that the method may greatly improve the measurement accuracy, and simplify the adjustment of the interferometric setups for an aspheric surface with strong asymmetric errors. 2004 Elsevier B.V. All rights reserved.
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/24572
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liu H.,Lu Z.,Li F.,et al. Testing aspheric in interferometric setups: Removal of adjustment errors from measurement result[J]. Optics Communications,2004,242(4—6):339-344.
APA	Liu H.,Lu Z.,Li F.,Xie Y.,&Sun Q..(2004).Testing aspheric in interferometric setups: Removal of adjustment errors from measurement result.Optics Communications,242(4—6),339-344.
MLA	Liu H.,et al."Testing aspheric in interferometric setups: Removal of adjustment errors from measurement result".Optics Communications 242.4—6(2004):339-344.

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