Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Study of a 2 2 MOEMS optical switch with electrostatic actuating | |
其他题名 | 论文其他题名 |
Sun D.M.; Dong W.; Wang G.D.; Liu C.X.; Yan X.; Xu B.K.; Chen W.Y. | |
2005 | |
发表期刊 | Sensors and Actuators, A: Physical |
ISSN | 9244247 |
卷号 | 120期号:1页码:249-256 |
摘要 | Based on the torsion dynamic theory, the method and relative formulae are presented for analyzing the actuating voltage and the switching time, on which the effect of the air squeeze film damping is already considered, for a 2 2 MOEMS optical switch with electrostatic actuating. The computed results show that the switching time will increase markedly under considering the air damping. Furthermore, an optical technique is described for the measurement of the actuating voltage and switching time of the device. Theoretical and experimental results obtained demonstrate the feasibility of the proposed method. The actuating voltage is about 50 V, and the switching time Toff and Ton are about 4.8 and 12.5 ms, respectively. 2004 Elsevier B.V. All rights reserved. |
收录类别 | EI |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/24563 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Sun D.M.,Dong W.,Wang G.D.,et al. Study of a 2 2 MOEMS optical switch with electrostatic actuating[J]. Sensors and Actuators, A: Physical,2005,120(1):249-256. |
APA | Sun D.M..,Dong W..,Wang G.D..,Liu C.X..,Yan X..,...&Chen W.Y..(2005).Study of a 2 2 MOEMS optical switch with electrostatic actuating.Sensors and Actuators, A: Physical,120(1),249-256. |
MLA | Sun D.M.,et al."Study of a 2 2 MOEMS optical switch with electrostatic actuating".Sensors and Actuators, A: Physical 120.1(2005):249-256. |
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