Experimental investigation of laser-produced-plasma EUV source based on liquid target

	Experimental investigation of laser-produced-plasma EUV source based on liquid target
其他题名	论文其他题名
	Qi L.H.; Ni Q.L.; Chen B.
	2005
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
ISSN	1004924X
卷号	13 期号:5 页码:604-607
摘要	A laser-produced plasma (LPP) source was built using liquid as target and a Nd:YAG laser as the irradiation laser, and the LPP source's radiation with ethanol and acetone target respectively was measured by an AXUV100 silicon photodiode combined with a McPHERSON model 247 grazing incidence monochromator of the resolution &le0.075 nm and the wavelength scanning interval 0.5 nm. Both ethanol and acetone target LPP source had EUV emission at 11-20 nm wavelength. The comparison between the spectra of the two kinds of target materials shows that all the two kinds of target source's spectra arc the result of oxygen ions' transitions under current source's parameters, but the spectrum intensity from different target sources is different. The spectra intensity from the ethanol target is higher than that from the acetone target. In addition, the target liquid is forced into the vacuum chamber by the background pressure supported by the connected external high pressure gas, and the influence of the background pressure on the source's intensity is investigated.
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/24555
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Qi L.H.,Ni Q.L.,Chen B.. Experimental investigation of laser-produced-plasma EUV source based on liquid target[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2005,13(5):604-607.
APA	Qi L.H.,Ni Q.L.,&Chen B..(2005).Experimental investigation of laser-produced-plasma EUV source based on liquid target.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,13(5),604-607.
MLA	Qi L.H.,et al."Experimental investigation of laser-produced-plasma EUV source based on liquid target".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 13.5(2005):604-607.

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