Fabricating a micro electromagnetic actuator with high energy density

	Fabricating a micro electromagnetic actuator with high energy density
其他题名	论文其他题名
	Liang C.; Zhang T.; Wu Y.; Zhang P.; Liu Y.
	2008
发表期刊	Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors
ISSN	2534177
卷号	29 期号:6 页码:1111-1116
摘要	This paper introduces a new technology to fabricate a micro electromagnetic actuator with high energy density without an enclosed magnetic circuit. This technology includes fabricating multi-turns planar micro coils and fabricating the thick magnetic (NiFe) core on the silicon wafer. The multi-turns planar micro coils are fabricated by the electroplating method from the surface along the line and by dynamically controlling the current density of the copper electrolytes. In order to fabricate thick NiFe plating, the adhesion properties between the NiFe plating and the silicon substrates are improved by changing the surface roughness of the silicon substrates and increasing the thickness of the seed layer. Furthermore, the micro electromagnetic actuator is tested and the energy density of the actuator is evaluated by force testing. The experiments show that the microactuator is efficient in producing high magnetic energy density and high magnetic force.
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/24510
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liang C.,Zhang T.,Wu Y.,et al. Fabricating a micro electromagnetic actuator with high energy density[J]. Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors,2008,29(6):1111-1116.
APA	Liang C.,Zhang T.,Wu Y.,Zhang P.,&Liu Y..(2008).Fabricating a micro electromagnetic actuator with high energy density.Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors,29(6),1111-1116.
MLA	Liang C.,et al."Fabricating a micro electromagnetic actuator with high energy density".Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors 29.6(2008):1111-1116.

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