Accurately measuring a surface by using a computer-generated hologram

	Accurately measuring a surface by using a computer-generated hologram
其他题名	论文其他题名
	Liu H.; Lu Z.; Zhang H.
	2008
发表期刊	Proceedings of SPIE - The International Society for Optical Engineering
ISSN	0277786X
卷号	7064
摘要	By using a CGH test plate fabricated with our equipment and techniques, we measured a perfect sphere surface. The measurement result is quantified into four parts: the figure error from the spherical surface under test; the figure error from the spherical reference surface; the error from hologram and the adjustment error from misalignment. The measurement result removed from the later three errors, shown excellent agreement with Zygo test of the same sphere surface. This verified that the measurement accuracy by using this kind of CGH could be very high.
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/24499
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liu H.,Lu Z.,Zhang H.. Accurately measuring a surface by using a computer-generated hologram[J]. Proceedings of SPIE - The International Society for Optical Engineering,2008,7064.
APA	Liu H.,Lu Z.,&Zhang H..(2008).Accurately measuring a surface by using a computer-generated hologram.Proceedings of SPIE - The International Society for Optical Engineering,7064.
MLA	Liu H.,et al."Accurately measuring a surface by using a computer-generated hologram".Proceedings of SPIE - The International Society for Optical Engineering 7064(2008).

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