Broadband multilayer-coated normal incidence blazed grating with 10% diffraction efficiency through the 13-16 nm wavelength region

	Broadband multilayer-coated normal incidence blazed grating with 10% diffraction efficiency through the 13-16 nm wavelength region
其他题名	论文其他题名
	Zhang L.; Lin H.; Jin C.; Zhou H.; Huo T.
	2009
发表期刊	Optics Letters
ISSN	1469592
卷号	34 期号:6 页码:818-820
摘要	Diffraction gratings used in extreme UV are typically coated with periodic multilayer thin films. These coatings have a small bandwidth, thus leading to a narrow usable spectral region of multilayer gratings. Well-designed aperiodic multilayer coatings could provide high reflectivity over a much broader wavelength region, so they could broaden the usable spectral region of multilayer gratings. We designed and deposited an aperiodic Mo/Si multilayer coating onto a blazed grating substrate. At an incidence angle of 10, the -2nd-order diffraction efficiency of the multilayer grating is 10% through the wavelength range of 13-16 nm. 2009 Optical Society of America.
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/24487
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang L.,Lin H.,Jin C.,et al. Broadband multilayer-coated normal incidence blazed grating with 10% diffraction efficiency through the 13-16 nm wavelength region[J]. Optics Letters,2009,34(6):818-820.
APA	Zhang L.,Lin H.,Jin C.,Zhou H.,&Huo T..(2009).Broadband multilayer-coated normal incidence blazed grating with 10% diffraction efficiency through the 13-16 nm wavelength region.Optics Letters,34(6),818-820.
MLA	Zhang L.,et al."Broadband multilayer-coated normal incidence blazed grating with 10% diffraction efficiency through the 13-16 nm wavelength region".Optics Letters 34.6(2009):818-820.

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