Structure, luminescence and electrical properties of ZnO thin films annealed in H2 and H2O ambient: A comparative study

	Structure, luminescence and electrical properties of ZnO thin films annealed in H2 and H2O ambient: A comparative study
其他题名	论文其他题名
	Liu W. W.; Yao B.; Li Y. F.; Li B. H.; Zhang Z. Z.; Shan C. X.; Zhao D. X.; Zhang J. Y.; Shen D. Z.; Fan X. W.
	2010
发表期刊	Thin Solid Films
ISSN	406090
卷号	518 期号:14 页码:3923-3928
摘要	Undoped ZnO films were grown on a c-plane sapphire by plasma-assisted molecular-beam epitaxy technique, and subsequently annealed at 200-500 C with steps of 100 C in water vapour and hydrogen ambient, respectively. It is found that the c-axis lattice constant of the ZnO films annealed in hydrogen or water vapour at 200 C increases sharply, thereafter decreases slowly with increasing annealing temperature ranging from 300 C to 500 C. The stress in the as-grown ZnO films was more easily relaxed in water vapour than in hydrogen ambient. Interestingly, the controversial luminescence band at 3.310 eV, which is often observed in photoluminescence (PL) spectra of the ZnO films doped by p-type dopants, was observed in the PL spectra of the annealed undoped ZnO films and the PL intensity increases with increasing annealing temperature, indicating that the 3.310 eV band is not related to p-type doping of ZnO films. The electron concentration of the ZnO films increases sharply with increasing annealing temperature when annealed in hydrogen ambient but decreases slowly when annealed in water vapour. The mechanisms of the effects of annealing ambient on the properties of the ZnO films are discussed. Crown Copyright 2009.
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/24466
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liu W. W.,Yao B.,Li Y. F.,et al. Structure, luminescence and electrical properties of ZnO thin films annealed in H2 and H2O ambient: A comparative study[J]. Thin Solid Films,2010,518(14):3923-3928.
APA	Liu W. W..,Yao B..,Li Y. F..,Li B. H..,Zhang Z. Z..,...&Fan X. W..(2010).Structure, luminescence and electrical properties of ZnO thin films annealed in H2 and H2O ambient: A comparative study.Thin Solid Films,518(14),3923-3928.
MLA	Liu W. W.,et al."Structure, luminescence and electrical properties of ZnO thin films annealed in H2 and H2O ambient: A comparative study".Thin Solid Films 518.14(2010):3923-3928.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Liu-2010-Structure, （930KB）			开放获取	--	浏览下载