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Design of integrated microlens for collimation of the vertical-cavity surface emitting laser array
其他题名论文其他题名
Hu Y.S.; Ye S.J.; Wang Z.F.; Qin L.; Ning Y.Q.
2010
发表期刊Optoelectronics Letters
ISSN16731905
卷号6期号:6页码:421-425
摘要A method based on the theory of transfer matrix to design the integrated microlens for the collimation of vertical-cavity surface emitting laser (VCSEL) array is presented. The integrated microlenses fabricated on the substrate directly and on a certain polymer material which is on the substrate are considered. The relationships between the radius of curvature, beam waist and the divergence angle after collimation are obtained with the help of ZEMAX. The results show that the devices with the divergence angle of 15 (1/e2) and beam waist of 2 m can be improved to those with the divergence angle lower than 1, and the devices with beam waist of 10 m can be improved to those with the divergence angle lower than 3, which is a good reference for manufacturing high-power devices with small divergence angle. The conclusions including increasing the thicknesses of both the substrate and polymer material and reducing the diameter of oxidized layer are drawn, which will be an important guidance for experiment research. 2010 Tianjin University of Technology and Springer-Verlag Berlin Heidelberg.
收录类别EI
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/24459
专题中科院长春光机所知识产出
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Hu Y.S.,Ye S.J.,Wang Z.F.,et al. Design of integrated microlens for collimation of the vertical-cavity surface emitting laser array[J]. Optoelectronics Letters,2010,6(6):421-425.
APA Hu Y.S.,Ye S.J.,Wang Z.F.,Qin L.,&Ning Y.Q..(2010).Design of integrated microlens for collimation of the vertical-cavity surface emitting laser array.Optoelectronics Letters,6(6),421-425.
MLA Hu Y.S.,et al."Design of integrated microlens for collimation of the vertical-cavity surface emitting laser array".Optoelectronics Letters 6.6(2010):421-425.
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