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激光位移传感器在物体表面形状测量中的应用
朱万彬
2010-10-01
Source Publication光机电信息
ISSN1007-1180
Volume27Issue:10Pages:70-72
Abstract激光位移传感器对位移的测量不仅是非接触式的测量方式,而且具有较高的精度,具有广泛的应用。本文研究了一种利用激光位移传感器测量工件上点的二维坐标,从而实现物体形状的高精度测量。通过一维电位移平台带动激光位移传感器扫描物体的表面,然后对测量的数据进行处理,进而得到物体的表面形貌。实验中采用的位移传感器分辨率为0.3μm,一维电位移平台重复定位精度高于2μm。
Document Type期刊论文
Identifierhttp://ir.ciomp.ac.cn/handle/181722/22255
Collection中科院长春光机所知识产出
Recommended Citation
GB/T 7714
朱万彬. 激光位移传感器在物体表面形状测量中的应用[J]. 光机电信息,2010,27(10):70-72.
APA 朱万彬.(2010).激光位移传感器在物体表面形状测量中的应用.光机电信息,27(10),70-72.
MLA 朱万彬."激光位移传感器在物体表面形状测量中的应用".光机电信息 27.10(2010):70-72.
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