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基于微光学阵列元件的二维位移测量装置 (发明)
卢振武; 刘华; 王尧; 孙强
Rights Holder中国科学院长春光学精密机械与物理研究所
Date Available2012-08-29
Funding Project102607428A
Application Number201210088617.4
Document Type专利
Recommended Citation
GB/T 7714
卢振武,刘华,王尧,等. 基于微光学阵列元件的二维位移测量装置 (发明)[P]. 2012-07-25.
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