CIOMP OpenIR  > 中科院长春光机所知识产出
基于微光学阵列元件的二维位移测量装置 (发明)
卢振武; 刘华; 王尧; 孙强
2012-07-25
Rights Holder中国科学院长春光学精密机械与物理研究所
Date Available2012-08-29
Subtype发明专利
Abstract基于微光学阵列元件的二维位移测量装置,涉及一种基于微光学元件的二维位移测量装置,解决现有二维位移测量中,需要两套独立测量系统,导致体积较大的问题,包括激光器、扩束镜、反射镜、二维参考微光学阵列元件、二维测量微光学阵列元件、聚焦透镜和二维面阵探测器;激光器发出的激光光束经扩束镜和反射镜后平行入射至二维参考微光学阵列元件,……
Funding Project102607428A
Application Number201210088617.4
Document Type专利
Identifierhttp://ir.ciomp.ac.cn/handle/181722/12229
Collection中科院长春光机所知识产出
Recommended Citation
GB/T 7714
卢振武,刘华,王尧,等. 基于微光学阵列元件的二维位移测量装置 (发明)[P]. 2012-07-25.
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